Monocrystalline silicon furnace harmonic control scheme

The single crystal furnace is a kind of equipment that uses high-purity graphite heater to melt polycrystalline raw materials such as photovoltaic cells in a rare gas environment, and uses the Czochralski method to grow a dislocation-free single crystal. Single crystal furnaces are commonly used. Many products such as monocrystalline silicon, monocrystalline germanium, and monocrystalline gallium arsenide are important raw materials for the electronics industry and other high-tech industries. With the continuous growth of my country’s economic development, the application of single crystal furnaces will become more and more extensive.

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As one of the important branches of industrial furnaces, single crystal furnaces consume a lot of energy. High electricity costs and high harmonic pollution lead to product quality degradation, which has become a heartache for many single crystal furnace users. In response to the urgent requirements of environmental protection and energy saving of many polysilicon furnace customers all over the world, many manufacturers have made a lot of favorable efforts and attempts. Many people try to protect the system from transients, surges and harmonic suppression products to carry out technological transformation projects on the polysilicon furnace system, but the actual application shows that the harmonic frequencies of the polysilicon furnace are mainly 5th, 7th and 11th harmonics (5 The maximum water content of the sub-harmonic exceeds 45%, the 7th harmonic 20%, the 11th harmonic 11%, the total frame loss rate exceeds 49.43%, the minimum power factor is only 0.4570, and the maximum power factor is only 0.6464). Therefore, the pulse current management method of these devices cannot be ignored, and the energy saving effect is not satisfactory. What’s more serious is that the pulse current energy greatly exceeds the load-bearing range of electrical equipment, and it is easy to damage after long-term use. The high incidence of accidents affects the normal operation of the company’s production, resulting in waste of resources and customer distress.
A set of filter compensation equipment designed by me for this type of equipment can effectively solve the above problems (two methods: if both harmonic control and reactive power compensation are required to exceed the standard, we use harmonic control loop + reactive power adjustment Loop; normal operation only requires reactive power compensation, and the power factor exceeds the specification. We use harmonic suppression reactive power compensation scheme). It can not only control harmonics, but also compensate reactive loads. It can completely eliminate harmonic environmental pollution and improve power factor. Significant economic benefits. Operating costs can generally be recovered within 3 to 5 months.

main feature:

1. For customer system software*, clear characteristic harmonics, such as: 5th, 7th, 11th, 13th, etc. The filtering effect is obvious.
2. Harmonics can be managed, compensation is ineffective
3. After the filter device is put into operation, it can significantly improve the power quality, improve the current impact caused by the impact load, reduce voltage fluctuations, suppress voltage flicker, improve voltage reliability, and improve voltage quality. The power factor can be increased to more than 0.96, and the reduction of user line loss can improve the load-carrying efficiency of the distribution transformer, and the economic benefits are obvious.
4. Performance vacuum switches are used to switch each filter loop. The automatic control system is detailed and the maintenance functions are perfect, such as over-current protection, over-voltage protection, over-current protection, etc. The actual operation is reliable and the operation is simple.

Advantages of Harmonic Governance:

1. After installing the pulse current control equipment, the harmonic current can be reasonably reduced, the reasonable volume of the transformer can be increased, the corresponding cable carrying capacity is also increased, and the project investment required for expansion is reduced.
2. After installing the pulse current control equipment, the loss of the transformer can be effectively reduced, the safe operation index of the transformer can be improved, and the purpose of energy saving and emission reduction can be achieved.

Solutions to choose from:

plan 1
For centralized management (suitable for multiple furnaces that share one transformer and operate simultaneously, the power distribution room is equipped with a filter compensation device)
1. Use harmonic control branch (5, 7, 11 filter) + reactive power regulation branch. After the filter compensation device is put into operation, the harmonic control and reactive power compensation of the power supply system meet the requirements.
2. Adopt active filter (remove the order of dynamic harmonics) and harmonic countermeasure branch circuit (5, 7, 11 order filter) # + invalid adjustment branch circuit, and after providing to the filter compensation equipment, put forward Request for invalid compensation of the power supply system.
3. Use invalid compensation devices (5.5%, 6% reactors) to suppress harmonics, and after putting in filter compensation devices, require the power supply system to perform invalid compensation
Scenario 2
On-site management (set a filter compensation panel next to the power supply panel of the monocrystalline silicon furnace)
1. Harmonic control branch (5, 7, 11 filtering) is adopted, and the harmonic reactive power reaches the standard after input.
2. Select protective reactor and filter dual-loop power supply (5th and 7th filter) to avoid mutual influence, and the pulse current after connection does not exceed the specification.


Post time: Apr-13-2023